Informations sur le produit
- BIS(SILYLMETHYL)SILANE
Volatile Carbosilane
Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide
framework can be shifted toward substituted silicon and diamond-like structures.
1,3,5-Trisilapentane; Bis(silylmethyl)silane; Trisilmethylene
Employed in ALD of SiC filmsEmployed in PECVD of silicon carbide and silicon carbonitride “seed” layers