Product Information
- CYCLOTRISILMETHYLENE
- 1,3,5-Trisilano-2,4,6-trimethylene
- Cyclocarbosilane
- Cyclotrimethylenetrisilane
Volatile Carbosilane
Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide
framework can be shifted toward substituted silicon and diamond-like structures.
1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane
Single source precursor for β-SiC by LPCVD at 800-1,000 °C