Product Information
Name:
1,3,5-TRISILAPENTANE
Synonyms:
- BIS(SILYLMETHYL)SILANE
Description:
Volatile Carbosilane
Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide
framework can be shifted toward substituted silicon and diamond-like structures.
1,3,5-Trisilapentane; Bis(silylmethyl)silane; Trisilmethylene
Employed in ALD of SiC filmsEmployed in PECVD of silicon carbide and silicon carbonitride “seed” layers
Notice:
Our products are intended for lab use only. For any other use, please contact us.
Brand:
Gelest
Long term storage:
Notes:
Chemical properties
Molecular weight:
120.37
Formula:
C2H12Si3
Purity:
98%
Color/Form:
Straw Liquid
MDL:
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HS code:
