Tetramethylol Acetylenediurea

CAS: 5395-50-6

Ref. TR-T889708

Product Information

• Name: Tetramethylol Acetylenediurea
• Synonyms: Glycoluril, 1,3,4,6-tetrakis(hydroxymethyl)- (6CI,7CI,8CI), Tetrahydro-1,3,4,6-tetrakis(hydroxymethyl)imidazo[4,5-d]imidazole-2,5(1H,3H)-dione, 1,3,4,6-Tetrakis(hydroxymethyl)glycoluril, 2,4,6,8-Tetrakis(hydroxymethyl)glycoluril, 2,5-Dioxo-1,3,4,6-tetrakis(hydroxymethyl)hexahydroimidazo[4,5-d]imidazole, Cymel 1172, Fixapret 140, N,N',N'',N'''-Tetrakis(hydroxymethyl)glycoluril, NSC 3319, NSC 67452, Protectol TD, Tetrahydro-1,3,4,6-tetrakis(hydroxymethyl)imidazo[4,5-d]imidazol-2,5(1H,3H)-dione, Tetrakis(hydroxymethyl)acetylenediurea, Tetrakis(hydroxymethyl)acetyleneurea, Tetrakis(hydroxymethyl)glycoluril, Tetramethylol acetylene carbamide, Tetramethylolacetylenediurea, Tetramethylolglycoluril, 1,3,4,6-Tetrakis(hydroxymethyl)-3a,6a-dihydroimidazo[4,5-d]imidazole-2,5-dione, 1,3,4,6-Tetrakis-hydroxymethyl-tetrahydro-imidazo(4,5-d)imidazole-2,5-dione, 1,3,4,6-tetrakis(hydroxymethyl)tetrahydroimidazo[4,5-d]imidazole-2,5(1H,3H)-dione, Glycoluril, 1,3,4,6-tetrakis(hydroxymethyl)-, Imidazo4,5-dimidazole-2,5(1H,3H)-dione, tetrahydro-1,3,4,6-tetrakis(hydroxymethyl)-, Imidazo[4,5-d]imidazole-2,5(1H,3H)-dione, tetrahydro-1,3,4,6-tetrakis(hydroxymethyl)-, N,N′,N′′,N′′′-Tetrakis(hydroxymethyl)glycoluril, Q 172, Tetrahydro-1,3,4,6-tetrakis(hydroxymethyl)imidazo[4,5-d]imidazol-2,5(1H,3H)-dion, Tetrahydroxy glycoluril, Tetrahydroxymethylglycoluril, Tetrakis (hydroxy methy1) glycoluril, Tetramethylol acetylene diuriene, Tetramethylol acetylenedurea, Tetramethylol glycoluril, tetrahydro-1,3,4,6-tetrakis(hydroxymethyl)imidazo[4,5-d]imidazole-2,5(1H,3H)-dione
• CAS: 5395-50-6

Description

Applications Tetramethylol Acetylenediurea is a useful additive for forming etching patterns in semiconductor manufacturing.
References Lee, S. J., et al.: PCT Int. Appl. (2020), WO 2020184904 A1

• Brand: TRC

Chemical properties

• Molecular weight: 262.22
• Formula: C₈H₁₄N₄O₆
• Color/Form: Neat
• InChI: InChI=1S/C8H14N4O6/c13-1-9-5-6(11(3-15)7(9)17)12(4-16)8(18)10(5)2-14/h5-6,13-16H,1-4H2
• InChI key: InChIKey=UUGLSEIATNSHRI-UHFFFAOYSA-N
• SMILES: O=C1N(CO)C2C(N1CO)N(CO)C(=O)N2CO