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1-Chloro-N,N,N′,N′,N′′,N′′-hexamethylsilanetriamine

CAS: 13307-05-6 - 1-Chloro-N,N,N′,N′,N′′,N′′-hexamethylsilanetriamine

Formula:C6H18ClN3Si

InChI:InChI=1S/C6H18ClN3Si/c1-8(2)11(7,9(3)4)10(5)6/h1-6H3

InChI key:InChIKey=YLZCZVGQEADVNK-UHFFFAOYSA-N

SMILES:Cl[Si](N(C)C)(N(C)C)N(C)C

  • Synonyms:
  • 1-chloro-N,N,N',N',N'',N''-hexamethylsilanetriamine
  • Chlorotris(dimethylamino)silane
  • Silanetriamine, 1-chloro-N,N,N′,N′,N′′,N′′-hexamethyl-
  • Tris(dimethylamino)silyl chloride
  • Trisdimethylaminochlorosilane
  • [Chlorobis(dimethylamino)silyl]dimethylamine
  • Tris(dimethylamino)chlorosilane
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Silanetriamine, 1-chloro-N,N,N',N',N'',N''-hexamethyl-

CAS:13307-05-6

Ref: IN-DA001463

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Tris(dimethylamino)chlorosilane

CAS:13307-05-6

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