Hexafluorodisilane, with the CAS number 13830-68-7, is a chemical compound composed of silicon and fluorine, specifically featuring two silicon atoms and six fluorine atoms. It is a colorless gas at room temperature and exhibits a pungent odor. This compound is notable for its high reactivity, particularly with moisture, leading to the formation of corrosive hydrofluoric acid and silicates. Hexafluorodisilane is primarily used in the semiconductor industry as a precursor for silicon and silicon-containing materials, particularly in chemical vapor deposition processes. Its molecular structure allows it to act as a source of silicon in various applications, including the production of thin films and coatings. Due to its fluorinated nature, it is also considered a potent greenhouse gas, necessitating careful handling and storage to mitigate environmental impact. Safety precautions are essential when working with this substance, as it can pose health risks through inhalation or skin contact.

Hexafluorodisilane

13830-68-7: Hexafluorodisilane, with the CAS number 13830-68-7, is a chemical compound composed of silicon and fluorine, specifically featuring two silicon atoms and six fluorine atoms. It is a colorless gas at room temperature and exhibits a pungent odor. This compound is notable for its high reactivity, particularly with moisture, leading to the formation of corrosive hydrofluoric acid and silicates. Hexafluorodisilane is primarily used in the semiconductor industry as a precursor for silicon and silicon-containing materials, particularly in chemical vapor deposition processes. Its molecular structure allows it to act as a source of silicon in various applications, including the production of thin films and coatings. Due to its fluorinated nature, it is also considered a potent greenhouse gas, necessitating careful handling and storage to mitigate environmental impact. Safety precautions are essential when working with this substance, as it can pose health risks through inhalation or skin contact.

CAS 13830-68-7

Hexafluorodisilane

Disilane, 1,1,1,2,2,2-hexafluoro-

Ref: IN-DA0018HA