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CAS 14049-36-6

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Silane, chlorotrifluoro-

Description:
Chlorotrifluorosilane, with the CAS number 14049-36-6, is a chemical compound characterized by its silane structure where three fluorine atoms and one chlorine atom are attached to a silicon atom. This compound is typically a colorless gas or a volatile liquid at room temperature and is known for its reactivity and volatility. Chlorotrifluorosilane is primarily used in the semiconductor industry for the deposition of silicon and silicon-based materials, as it can serve as a precursor in chemical vapor deposition processes. It is also utilized in the production of fluorinated silanes and other silicon-based compounds. The presence of fluorine atoms imparts unique properties, such as increased stability and hydrophobicity, making it valuable in various applications. However, it is important to handle this substance with care, as it can be toxic and corrosive, posing risks to health and the environment. Proper safety measures, including the use of personal protective equipment and adequate ventilation, are essential when working with this compound.
Formula:ClF3Si
InChI:InChI=1S/ClF3Si/c1-5(2,3)4
InChI key:InChIKey=WOLDFAYTXKMDAQ-UHFFFAOYSA-N
SMILES:[Si](Cl)(F)(F)F
Synonyms:
  • Chlorotrifluorosilane
  • Silane, chlorotrifluoro-
  • Silicon chloride fluoride (SiClF<sub>3</sub>)
  • Silicon chloride trifluoride
  • Trifluorochlorosilane
  • Silicon chloride fluoride (SiClF3)
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