CAS: 15112-89-7 - N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine

Formula: C₆H₁₉N₃Si

InChI: InChI=1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

InChI key: InChIKey=TWVSWDVJBJKDAA-UHFFFAOYSA-N

SMILES: N(C)(C)[SiH](N(C)C)N(C)C

Synonyms:

• Brn 1901643
• Ls 1460
• N,N,N',N',N'',N''-Hexamethylsilanetriamine
• Silanetriamine, N,N,N',N',N'',N''-hexamethyl-
• Tri(dimethylamino)silane
• Tris(Dimethylamino)Silyl
• [Bis(dimethylamino)silyl]dimethylamine
• Tris(dimethylamino)silane

Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD

CAS: 15112-89-7

• Formula: (CH₃)₂NSiH
• Purity: (99.999%-Si)
• Color and Shape: colorless to light yellow liq.
• Molecular weight: 161.32

Silanetriamine, N,N,N',N',N'',N''-hexamethyl-

CAS: 15112-89-7

• Formula: C₆H₁₉N₃Si
• Purity: 99%
• Color and Shape: Liquid
• Molecular weight: 161.3207

TRIS(DIMETHYLAMINO)SILANE

CAS: 15112-89-7

ALD Material Atomic layer deposition (ALD) is a chemically self-limiting deposition technique that is based …

• Formula: C₆H₁₉N₃Si
• Purity: 97%
• Color and Shape: Straw Liquid
• Molecular weight: 161.32

Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM

CAS: 15112-89-7

• Formula: (CH₃)₂NSiH
• Purity: (99.999%-Si)
• Color and Shape: colorless to light yellow liq.
• Molecular weight: 161.32

Silanetriamine, N,N,N',N',N'',N''-hexamethyl-

CAS: 15112-89-7

Silanetriamine, N,N,N',N',N'',N''-hexamethyl- is a chemical compound that belongs to the group of amines. It is …

• Formula: C₆H₁₉N₃Si
• Purity: Min. 95%
• Molecular weight: 161.32 g/mol