CAS 175923-04-3
:TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Description:
Tetrakis(ethylmethylamino)zirconium, with the CAS number 175923-04-3, is an organometallic compound that features a zirconium center coordinated to four ethylmethylamino ligands. This compound is typically used in chemical vapor deposition (CVD) processes, particularly in the fabrication of thin films for semiconductor applications. Its structure allows for the formation of stable complexes, which can facilitate the deposition of zirconium-containing materials on various substrates. Tetrakis(ethylmethylamino)zirconium is characterized by its relatively low volatility and high reactivity, making it suitable for processes that require precise control over film composition and thickness. Additionally, it is important to handle this compound with care, as it may pose health and safety risks, including potential toxicity and flammability. Proper storage and handling protocols should be followed to mitigate these risks. Overall, this compound plays a significant role in advanced materials science, particularly in the development of high-performance electronic devices.
Formula:C12H32N4Zr
InChI:InChI=1/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4/rC12H32N4Zr/c1-9-13(5)17(14(6)10-2,15(7)11-3)16(8)12-4/h9-12H2,1-8H3
SMILES:CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C.[Zr]
Synonyms:- Zirconium Tetrakis(Ethylmethylamide)
- Tetrakis(ethyl Methyl amido) zirconium
- Tetrakis(Ethylmethylamido)Zirconium(Iv)
- Tetrakis(Ethylmethylamino)Zirconium(Iv)
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Found 4 products.
Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ
CAS:<p>Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ</p>Formula:ZrN(CH3)(CH2CH3)Purity:99%Color and Shape:light yellow liq.Molecular weight:323.63Tetrakis(ethylmethylamino)zirconium(IV) 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD
CAS:<p>Tetrakis(ethylmethylamino)zirconium(IV) 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD</p>Formula:ZrN(CH3)(CH2CH3)Purity:99%Color and Shape:light yellow liq.Molecular weight:323.63Tetrakis(ethylmethylamino)zirconium(IV)
CAS:<p>Tetrakis(ethylmethylamino)zirconium(IV) is a metal compound that reacts with water vapor and oxygen to form hydrogen gas. It has been shown to be luminous, with an emission spectrum peak at 490nm in the gaseous state. Tetrakis(ethylmethylamino)zirconium(IV) is a strong oxidizing agent that does not react with water vapor, but does react with oxygen. The rate of this reaction increases as the temperature increases, but it is inhibited by encapsulating it in magnesium oxide. This compound has been used in microscopy to detect water vapor in air and can also be used for the detection of lanthanum, which emits gamma rays when irradiated by a radioactive source. The mechanism of this reaction is not well understood, but it may involve the formation of an intermediate complex followed by a proton transfer and subsequent electron transfer from magnesium to zirconium oxide.</p>Formula:C12H32N4ZrPurity:Min. 95%Molecular weight:323.63 g/molEthanamine, N-methyl-, zirconium(4+) salt (4:1)
CAS:Formula:C12H32N4ZrPurity:99%Molecular weight:323.6333



