CymitQuimica logo

CAS 175923-04-3

:

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

Description:
Tetrakis(ethylmethylamino)zirconium, with the CAS number 175923-04-3, is an organometallic compound that features a zirconium center coordinated to four ethylmethylamino ligands. This compound is typically used in chemical vapor deposition (CVD) processes, particularly in the fabrication of thin films for semiconductor applications. Its structure allows for the formation of stable complexes, which can facilitate the deposition of zirconium-containing materials on various substrates. Tetrakis(ethylmethylamino)zirconium is characterized by its relatively low volatility and high reactivity, making it suitable for processes that require precise control over film composition and thickness. Additionally, it is important to handle this compound with care, as it may pose health and safety risks, including potential toxicity and flammability. Proper storage and handling protocols should be followed to mitigate these risks. Overall, this compound plays a significant role in advanced materials science, particularly in the development of high-performance electronic devices.
Formula:C12H32N4Zr
InChI:InChI=1/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4/rC12H32N4Zr/c1-9-13(5)17(14(6)10-2,15(7)11-3)16(8)12-4/h9-12H2,1-8H3
SMILES:CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C.[Zr]
Synonyms:
  • Zirconium Tetrakis(Ethylmethylamide)
  • Tetrakis(ethyl Methyl amido) zirconium
  • Tetrakis(Ethylmethylamido)Zirconium(Iv)
  • Tetrakis(Ethylmethylamino)Zirconium(Iv)
Sort by

Purity (%)
0
100
|
0
|
50
|
90
|
95
|
100
Found 4 products.