CAS 19824-55-6: Tetrakis(diethylamino)hafnium(IV)

Description: Tetrakis(diethylamino)hafnium(IV), with the CAS number 19824-55-6, is an organometallic compound that features hafnium in a +4 oxidation state coordinated to four diethylamino ligands. This compound is typically a colorless to pale yellow liquid at room temperature and is known for its volatility and relatively low viscosity, making it suitable for chemical vapor deposition (CVD) processes, particularly in the semiconductor industry for the deposition of hafnium oxide films. The diethylamino groups enhance its solubility and reactivity, allowing for easier handling and manipulation in various chemical processes. Tetrakis(diethylamino)hafnium(IV) is sensitive to moisture and air, necessitating careful storage and handling under inert atmospheres to prevent hydrolysis and oxidation. Its thermal stability and reactivity make it a valuable precursor in materials science, particularly in the fabrication of high-k dielectrics and other advanced materials. Safety precautions are essential when working with this compound due to its potential toxicity and reactivity.

Formula: C₁₆H₄₀HfN₄

InChI: InChI=1/4C4H10N.Hf/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4/rC16H40HfN4/c1-9-18(10-2)17(19(11-3)12-4,20(13-5)14-6)21(15-7)16-8/h9-16H2,1-8H3

Synonyms:

• Hafnium, tetrakis(diethylamino)-
• Hafnium Tetrakis(Diethylazanide)
• Tetrakis(Diethylamino)Hafnium

Ethanamine, N-ethyl-, hafnium(4+) salt (4:1)

CAS: 19824-55-6

• Formula: C₁₆H₄₀HfN₄
• Purity: 99.99%
• Molecular weight: 467.0056

Tetrakis(diethylamino)hafnium, 99% (99.99+%-Hf, <0.2% Zr) PURATREM

CAS: 19824-55-6

• Formula: HfN(CH₂CH₃)₂
• Purity: (99.99+%-Hf, <0.2% Zr)
• Color and Shape: light yellow liq.
• Molecular weight: 467.01

HAFNIUM DIETHYLAMIDE

CAS: 19824-55-6

• Formula: C₁₆H₄₀HfN₄
• Color and Shape: Yellow-Amber Solid
• Molecular weight: 467.01