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CAS 7783-82-6

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Tungsten fluoride (WF6), (OC-6-11)-

Description:
Tungsten fluoride (WF6) is a chemical compound characterized by its high reactivity and volatility. It is a colorless gas at room temperature and is known for its strong oxidizing properties. WF6 is primarily used in the semiconductor industry for the deposition of tungsten films through chemical vapor deposition (CVD) processes. The compound has a molecular structure that allows it to easily react with moisture, forming hydrofluoric acid and tungsten oxides, which necessitates careful handling and storage under inert conditions. Tungsten fluoride is also notable for its high molecular weight and density compared to other fluorides. Due to its toxic and corrosive nature, appropriate safety measures must be taken when working with this substance, including the use of protective equipment and proper ventilation. Its CAS number, 7783-82-6, is a unique identifier that facilitates the tracking and regulation of this chemical in various applications. Overall, WF6 is an important compound in advanced materials science, particularly in the fabrication of electronic components.
Formula:F6W
InChI:InChI=1S/6FH.W/h6*1H;/q;;;;;;+6/p-6
InChI key:InChIKey=NXHILIPIEUBEPD-UHFFFAOYSA-H
SMILES:[W](F)(F)(F)(F)(F)F
Synonyms:
  • Hexafluorotungsten
  • Hexafluorure de tungstene
  • Hexafluoruro De Volframio
  • Tungsten (Vi) Hexafluoride
  • Tungsten fluoride
  • Tungsten fluoride (WF6)
  • Tungsten fluoride (WF6), (OC-6-11)-
  • Tungsten fluoride (WF<sub>6</sub>)
  • Tungsten fluoride (WF<sub>6</sub>), (OC-6-11)-
  • Tungsten hexafluoride (WF6)
  • See more synonyms
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