Product Information
- trisilicon pentatitanium
- Pentatitanium Trisilicide
- Pentatitanium trisilicon
- Pentatitantrisilicid
- Titanium silicide
- Titanium silicide (Ti<sub>5</sub>Si<sub>3</sub>)
- Titanium silicide (TiSi0.6)
- Trisiliciure de pentatitane
- Trisiliciuro De Pentatitanio
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase. This Thermo Scientific Chemicals brand product was originally part of the Alfa Aesar product portfolio. Some documentation and label information may refer to the legacy brand. The original Alfa Aesar product / item code or SKU reference has not changed as a part of the brand transition to Thermo Scientific Chemicals.
Chemical properties
Technical inquiry about: 02-013087 Titanium silicide, 99.5% (metals basis)
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