Product Information
- Arsenate(1-), hexafluoro-, triphenylsulfonium
- Sulfonium, triphenyl-, hexafluoroarsenate(1-)
- Sulfonium, triphenyl-, hexafluoroarsenate(1-) (1:1)
- Triphenylsulfonium
- Triphenylsulfonium Hexafluoroarsenate(1-)
Triphenylsulfonium hexafluoroarsenate (TPS) is an organic compound that is used as a cross-linking agent in the polymerization of polymers. It can be used to form photoresist, which is a light-sensitive resin applied to a silicon wafer before the wafer is patterned and etched with semiconductor devices. TPS reacts with alcohol groups in the resin to form acid, and it also reacts with potassium ions to form cationic polymers. TPS has been used in process optimization for optical applications, such as radiation and optically induced polymerization. TPS may be reactive or nonreactive depending on its chemical environment.
Chemical properties
Technical inquiry about: 3D-FT83499 Triphenylsulfonium hexafluoroarsenate
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