Product Information
- Methyl Ethylsulfonate
- Ethanesulfonic Acid Methyl Ester
- Brn 1747452
- Ethanesulfonic acid, methyl ester
- Methyl ethane sulphonate
- Methyl ethanesulfonate
- Methyl ethylsulfonate
- Methylethanesulfonate
Applications Methyl Ethanesulfonate is a sulfonic acid ester that is transparent at around 157 nm region, and is used in DFT calculations of vacuum-UV spectra in order to design the vinyl alkylsulfonate polymers for vacuum-UV photoresist applications.
References Fujigaya, T., et al.: J. Photopolym. Sci. Tec., 15, 643 (2002);
Chemical properties
Technical inquiry about: TR-M304795 Methyl Ethanesulfonate
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