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CAS 1624-01-7

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Tetrakis(dimethylamino)silane

Description:
Tetrakis(dimethylamino)silane (TDAS) is an organosilicon compound characterized by its four dimethylamino groups attached to a silicon atom. It is a colorless to yellowish liquid with a relatively low viscosity and a distinctive amine-like odor. TDAS is known for its reactivity, particularly in chemical vapor deposition processes, where it serves as a precursor for silicon-based thin films. The presence of the dimethylamino groups imparts significant nucleophilicity, making it useful in various synthetic applications, including the production of silicon nitride and silicon carbide. It is also soluble in organic solvents, which enhances its utility in diverse chemical environments. However, TDAS can be hazardous; it is flammable and may cause irritation upon contact with skin or eyes. Proper handling and safety precautions are essential when working with this compound. Overall, tetrakis(dimethylamino)silane is a valuable reagent in materials science and semiconductor manufacturing due to its unique chemical properties and versatility.
Formula:C8H24N4Si
InChI:InChI=1/C8H24N4Si/c1-9(2)13(10(3)4,11(5)6)12(7)8/h1-8H3
InChI key:InChIKey=SSCVMVQLICADPI-UHFFFAOYSA-N
SMILES:[Si](N(C)C)(N(C)C)(N(C)C)N(C)C
Synonyms:
  • N,N,N',N',N'',N'',N''',N'''-octamethylsilanetetramine
  • NSC 130238
  • Octamethylsilanetetramine
  • Silanetetramine, N,N,N′,N′,N′′,N′′,N′′′,N′′′-octamethyl-
  • Silanetetramine, octamethyl-
  • Tetra(dimethylamino)silane
  • Tetrakis(dimethylamido)silicon
  • Tetrakis(dimethylamino)silicon
  • Tetrakis(dimethylamino)silane
  • octamethyl-silanetetramin
  • See more synonyms
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