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CAS 19782-68-4

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TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV),

Description:
Tetrakis(dimethylamido)hafnium(IV) is an organometallic compound with the formula Hf(N(CH₃)₂)₄. It is characterized by its coordination of four dimethylamido ligands to a central hafnium atom, which is in the +4 oxidation state. This compound is typically a colorless to light yellow liquid or solid, depending on its form and purity. It is known for its volatility and is often used as a precursor in chemical vapor deposition (CVD) processes for hafnium oxide thin films, which are important in semiconductor manufacturing and other advanced materials applications. Tetrakis(dimethylamido)hafnium(IV) is sensitive to moisture and air, requiring careful handling under inert conditions to prevent hydrolysis and oxidation. Its thermal stability allows it to decompose at elevated temperatures, releasing hafnium and nitrogen-containing byproducts. Due to its organometallic nature, it exhibits unique reactivity and properties compared to traditional hafnium compounds, making it valuable in materials science and nanotechnology.
Formula:C8H24HfN4
InChI:InChI=1/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4/rC8H24HfN4/c1-10(2)9(11(3)4,12(5)6)13(7)8/h1-8H3
SMILES:C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Hf]
Synonyms:
  • Tetrakis(Dimethylamido)Hafnium(Iv), 99.99+%
  • Hafnium Tetrakis(Dimethylazanide)
  • Tetrakis(Dimethylamino)Hafnium
  • Tetrakis(dimethylamido)hafnium(IV)
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